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Via-filling Solutions

Via-filling substrate

  • Via-filling substrateサムネイル1
  • Via-filling substrateサムネイル1

By employing a high-conductivity, non-shrinkage via-filling process, copper paste or silver paste can be uniformly filled into a wide variety of via structures.

This technology has been widely adopted in ceramic packages for telecommunications applications and has earned a strong reputation for high reliability and consistent quality.

We supply these products as via-filled semi-finished substrates and provide a comprehensive service covering via drilling, via filling, and polishing.

By offering a one-stop process solution, we help simplify process management and ensure consistent product quality.

Product Details

Features

  • Highly Reliable and High-Performance Via-Filled Structures
    Uniform via filling with minimal voids and gaps provides excellent adhesion to the substrate. These structures offer outstanding electrical and mechanical reliability and are suitable for applications requiring high-density wiring and high heat dissipation performance.

    Smooth Substrate Surface for Improved Mountability
    The substrate surface can be finished to a high degree of flatness, enabling component mounting directly above filled vias. This increases design flexibility and allows more efficient utilization of substrate space.

    Compliance with Environmental Regulations
    Compliant with the RoHS 2 Directive, these materials can be used with confidence while helping to reduce environmental impact.

Specification

Ceramic substrate    Ceramic substrate   Ceramic substrate   Glass substrate  Glass substrate Organic substrate 
Substrates Substrate Material  AlN, Al₂O₃, SiN Quartz glass, Alkali-free glass Glass epoxy
Size, Thickness 2×2~4.5×4.5 inch, 0.2~1.0 mm 2×2~4.5×4.5 inch, 0.2~1.0 mm 2×2~4.5×4.5 inch, 0.2~1.0 mm 
Via Filled Metal Ag   Cu Ag-Cu alloy Ag Cu Ag
Via Diameter Φ0.05~1.0 mm Φ0.05~2.0 mm Φ0.05~1.0 mm Φ0.05~0.5 mm Φ0.05~0.5 mm Φ0.05~0.5 mm
Firing Temperature ~900 ℃ ~900 ℃ ~900 ℃ 500~600 ℃ 400~800 ℃ 200~300 ℃
Firing Atmosphere Air N₂ N₂ Air N₂ Air
Specific Resistivity 3~4 µΩ・cm 5~7 µΩ・cm 10 µΩ・cm 2~4 µΩ・cm 3~6 µΩ・cm 5~8 µΩ・cm
Aspect Ratio 1.0~10.0 1.0~10.0 1.0~10.0 1.0~10.0 1.0~10.0 1.0~10.0
Non-polished Flatness of filled area <±30 µm <±30 µm - <±20 µm <±20 µm <±20 µm
LAP polishing Recommended
Polishing Allowance*
>0.15 mm >0.15 mm >0.15 mm >0.15 mm >0.15 mm >0.15 mm
Flatness of filled area <±3 µm  <±3 µm  <±3 µm  <±3 µm  <±3 µm  <±3 µm 
POL polishing Recommended
Polishing Allowance*
>0.15 mm  >0.15 mm  >0.15 mm  >0.15 mm  >0.15 mm  >0.15 mm 
Flatness of filled area <±2 µm  <±2 µm  <±2 µm  - -
Via cross-section
el_vi_01_02.png el_vi_01_03.png el_vi_01_04.png el_vi_01_05.png el_vi_01_06.png el_vi_01_07.png
Via surface
el_vi_01_08.png el_vi_01_09.png el_vi_01_10.png el_vi_01_11.png el_vi_01_12.png el_vi_01_13.png

Application Example

  • Package Substrates and Module Substrates Requiring High Reliability and Efficient Heat Dissipation

Product Introduction Video

  • Via-filling Substrate