Via-filling Solutions
Via-filling substrate
Product Details
Features
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Highly Reliable and High-Performance Via-Filled Structures
Uniform via filling with minimal voids and gaps provides excellent adhesion to the substrate. These structures offer outstanding electrical and mechanical reliability and are suitable for applications requiring high-density wiring and high heat dissipation performance.Smooth Substrate Surface for Improved Mountability
The substrate surface can be finished to a high degree of flatness, enabling component mounting directly above filled vias. This increases design flexibility and allows more efficient utilization of substrate space.Compliance with Environmental Regulations
Compliant with the RoHS 2 Directive, these materials can be used with confidence while helping to reduce environmental impact.
Specification
| Ceramic substrate | Ceramic substrate | Ceramic substrate | Glass substrate | Glass substrate | Organic substrate | ||
|---|---|---|---|---|---|---|---|
| Substrates | Substrate Material | AlN, Al₂O₃, SiN | Quartz glass, Alkali-free glass | Glass epoxy | |||
| Size, Thickness | 2×2~4.5×4.5 inch, 0.2~1.0 mm | 2×2~4.5×4.5 inch, 0.2~1.0 mm | 2×2~4.5×4.5 inch, 0.2~1.0 mm | ||||
| Via | Filled Metal | Ag | Cu | Ag-Cu alloy | Ag | Cu | Ag |
| Via Diameter | Φ0.05~1.0 mm | Φ0.05~2.0 mm | Φ0.05~1.0 mm | Φ0.05~0.5 mm | Φ0.05~0.5 mm | Φ0.05~0.5 mm | |
| Firing Temperature | ~900 ℃ | ~900 ℃ | ~900 ℃ | 500~600 ℃ | 400~800 ℃ | 200~300 ℃ | |
| Firing Atmosphere | Air | N₂ | N₂ | Air | N₂ | Air | |
| Specific Resistivity | 3~4 µΩ・cm | 5~7 µΩ・cm | 10 µΩ・cm | 2~4 µΩ・cm | 3~6 µΩ・cm | 5~8 µΩ・cm | |
| Aspect Ratio | 1.0~10.0 | 1.0~10.0 | 1.0~10.0 | 1.0~10.0 | 1.0~10.0 | 1.0~10.0 | |
| Non-polished | Flatness of filled area | <±30 µm | <±30 µm | - | <±20 µm | <±20 µm | <±20 µm |
| LAP polishing | Recommended Polishing Allowance* |
>0.15 mm | >0.15 mm | >0.15 mm | >0.15 mm | >0.15 mm | >0.15 mm |
| Flatness of filled area | <±3 µm | <±3 µm | <±3 µm | <±3 µm | <±3 µm | <±3 µm | |
| POL polishing | Recommended Polishing Allowance* |
>0.15 mm | >0.15 mm | >0.15 mm | >0.15 mm | >0.15 mm | >0.15 mm |
| Flatness of filled area | <±2 µm | <±2 µm | <±2 µm | - | - | ||
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Via cross-section
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Via surface
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Application Example
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Package Substrates and Module Substrates Requiring High Reliability and Efficient Heat Dissipation
Product Introduction Video
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Via-filling Substrate











